SPS technologies are applicable not only to sintering but also to material bonding, synthesizing or surface modification processes. So it is required to involve both of hardware and software (machining know-how) in view of vacuum technology, press working technology, control technology, and temperature measurement technology. Our SPS centers are therefore ready to provide advices for new material bonding method based on these technological back ground.
Gyrotron Transmitter(water cooled) | |||
| Frequency | 24±0.5GHｚ | Max.voltage | 15ｋＶ |
| Max. Output | 3.0kＷ (continuous) | Max current | 1.0Ａ |
| Controllable range | 0.2－3.0ｋＷ | Outlet diameter | φ32.6mm |
| Electron gun | Diode type | Oscillation mode | ＴＥ11 |
| Max pressure | 10ｋN |
| Pressurizing sroke | 50mm（open height 150mm） |
| Pressurizing mechanism | Single axis (vertical) by AC servo moor |
| Deposition Source | 2kw3Electron gun 980-7104(ANELVA) | |
| Resistance Heating Port | ||
| Dimensions | Main Unit ： 1500W×500D×1550H | |
| Electron gun panel:： 500W×500D×1200H | ||
| Board Size | φ150 | |
| Control | High Vacuum Emission Chamber leak | |
| Deposition operation Board Shutter operation | ||
| All manual mode | ||
| Exhaust Shell | Rough | Rotary Pump ：Exhaust speed 250L/min |
| Achievable pressure 2x10-1Pa | ||
| High Vacuum | Turbo molecular pump ：Exhaust speed 220L/S | |
| Acievable pressure 1×10-6Pa | ||
| Utility | Power input | 3phase AC200V-50A |
| Water | 4L/min | |
These are small equipment for experiment use. BY integrating operation panel and main unit, much installation space can be saved, Deposition source is equipped with one unit of 3 serial electron gun of 2kwand Resistance Heating Port and can be used simultaneously. Organic EL deposition is also available by resistance heating for which shield plate is mounted to avoid contamination between deposition sources. There are also shield plates inside of the chamber. Replacement of shield plates are designed to be simple.
